The effect of slot antenna structures on plasma production was
investigated in the large-area planar surface wave plasmas (SWPs) excited with
2.45 GHz microwave energy. Plasma production characteristics were measured for
various types of slot antennae (inclined, transverse, longitudinal and
diverging slots) in Ar discharges. In all the slot antennae, we clearly
observed the density jumps when the incident power and pressure were varied.
These density jumps correspond to the mode jumps between transverse magnetic
(TM) eigenmodes in the SWP. In spite of different slot antenna structures, the
same optical emission patterns of the TM62 mode were observed at
the almost same electron density, except for the diverging slots, in which the
TM92 mode was selectively excited under the same operating
conditions, where the incident power was 0.8-1.2 kW at a pressure of
100-280 mTorr. At lower pressures, say 10 mTorr, the plasmas entirely
broadened over the chamber cross section for all the slot antennae. Among the
four slot antennae, the transverse slot antenna was more efficient for plasma
production under the same incident microwave power at a fixed pressure.