The papers contained in this section are a selection of those presented at
the conference `The Future of Technological Plasmas', which was a two day
meeting within the IOP Annual Congress held in Brighton, UK, between 19-21
March 2001.
The term `technological plasmas' has been defined in
several ways over the years, depending on how large the scope of the topic considered. For example, one definition stated that these are basically
laboratory plasmas, which would include all pressure ranges, including
atmospheric, and also different types of plasma such as arc or corona. To narrow
this all encompassing definition, it is possible to restrict the scope to
plasmas that are used for technological applications, rather than experimental
characterisation of interesting phenomena. The term is now well established [1],
even though the definition may not be so well defined! Our scope here was to address
the future demands of technological
plasmas, including plasmas used by the semiconductor industry, atmospheric
plasmas, and plasmas for surface modification and we hoped to reflect the interaction of academia and industry. All issues related to
technological plasmas were solicited, including equipment design, processes and
process control, plasma measurement and diagnostic techniques, plasma and
process modeling, feedback and interactive control strategies, material
processing including thin film deposition and etching, plasma processing for
applications such as nanofabrication, nanotechnology, biology, medicine,
electronics and electrical engineering.
We hope that the readers of Journal of Physics D: Applied Physics will enjoy sampling the range and depth of
topics covered by this issue. The timing of the meeting, and hence the
publication of the cluster, reflects the various initiatives of the past ten
years which have aimed to raise the profile of technological plasmas as an
underpinning tool to many disciplines and industrial applications.
Acknowledgments
Thanks to Mahfuzer Rahman at Glasgow University, my conference
co-organiser, who did much to cajole the invited speakers along and acted as
co-guest editor for this cluster; The Institute's Surface Science and
Technology Division; Marconi Caswell and also to the staff in the Conference
Department of the Institute of Physics for undertaking the administrative tasks.
References
[1] See for example Graham B 2001 Physics World14 (3) 31-6
Dr A P Webb, Guest Editor
August 2001