Energetic ion bombardment of solid targets can lead to the
production of atomic recoils and defects within the solid and the ejection
or sputtering of atoms from the surface with the consequent erosion of the
solid. The yield of sputtered atoms per ion depends on a number of ion and
target parameters but, particularly, on the gradient of the surface with
respect to the incident ion flux, the surface curvature and higher spatial
derivatives of the height. As a result of these dependences of the local
erosion rate, the morphology of a surface can be modified. But, in
addition, surface atomic relaxation effects which may be mediated by the
irradiation can occur and so the evolution of the surface may be complex.
If the nature of these, often competing, processes is understood and can
be suitably controlled by selection of experimental conditions, ion beam
erosion can be employed to generate useful surface geometries.
This review briefly summarizes current understanding of the sputtering
process and the origin of the above dependences and describes how, if only
a surface gradient related mechanism dominates, the evolution of surface
geometry can be accurately predicted. The higher-order and surface
relaxation processes are then considered in both a deterministic approach
and in a stochastic approach and these are shown to lead to fine spatial
scale modifications to evolving surfaces. In both these areas, the
physical models are supported by experimental observations. It is then
shown how the lowest and higher orders and competing mechanisms can be
selected in order to produce the desired surface morphologies in several
application areas, including depth profiling of impurities in solids, ion
milling and polishing, and the creation of repetitive surface structures.