Spray pyrolysis was used to prepare polycrystalline thin films of undoped
Ga2O3, as well as those doped separately with
Eu3+, Tb3+ and Tm3+.
The energy gap values of the as-grown films and those annealed at
600\r{}C and 900\r{}C were found to be 4.75, 4.48 and 4.44 eV, respectively.
Films containing Eu3+ and Tb3+ exhibited
red and green cathodoluminescence (CL), respectively. The CL of
Ga2O3 : Tm mainly showed a broad band in the blue-green region,
which resulted from the emission by both the Ga2O3 host
and Tm3+. The broad blue-green emission band was divided
into three Gaussian peaks at 424 nm (2.92 eV), 497 nm (2.49 eV)
and 526 nm (2.36 eV). The CL intensity of undoped Ga2O3 thin
films depended on the annealing ambient and temperature,
suggesting that it is associated with the presence of oxygen
vacancies. Mechanisms responsible for the broad blue-green
emission of undoped Ga2O3 thin films were explored.