In this paper a point-to-plane, low-pressure discharge in nitrogen is numerically studied. A classical 1.5D discharge model is used to describe the charged species evolution. This model has already permitted the description the behaviour of the main discharge parameters, as for instance the electron current density, which influences the production of active species. The evolution of neutral species is now obtained by solving the kinetic equations at each grid point.
After summarizing some of the main discharge aspects, an insight is given into the kinetics of the vibrationally resolved electronic states of molecular nitrogen. The latter play a central role in most surface treatment applications of such discharges. The dominant gain and loss mechanisms for the excited states' densities are identified, emphasizing on the metastable state
, whose importance in surface treatment applications has already been shown by previous studies.
The spatio-temporal description of the N2(
) and N2(
) vibrationally excited states shows that when the glow regime is established, the former attains for v = 1 a density of 1014 cm−3, whereas the latter attains for v = 8 the value 1011 cm−3, which are their maximum values. Both can efficiently supply their potential energy to inflict surface modification of materials. Vibrational distribution functions (VDFs) are given for the electronic states during the successive discharge phases. The VDFs are compared with Boltzmann distributions and deviations from the Boltzmann regime are discussed.
Predictions of the model concerning the luminous activity of such a discharge are presented and compared with experimental measurements yielding satisfactory qualitative agreement.