The equilibrium state of induction discharge plasmas in argon has been examined for a wide range of pressures (7·6 to 760 Torr) and with electron densities ranging from 3×1014 to 8×1015 cm−3. Grossly non-thermal conditions are obtained when the electron density falls below 1015 cm−3. For higher densities the approach to LTE (local thermal equilibrium) depends on the strength of the local heating fields and temperature gradients.
The conventionally used LTE criteria are found to give only order of magnitude predictions of the onset of experimental departures from LTE. Kinetic non-equilibrium arising from the heating fields is shown to be strongly affected by diffusion mixing of hot electrons over distances comparable with the plasma size. Even at atmospheric pressure diffusion-mixing distances in non-uniform fields are of the order of 2 mm.
Strong temperature gradients are also found to be important but only indirectly, and the observed departures from LTE are not adequately explained by the conventional criterion (d/T) (dT/dr)<<1. Instead ambipolar diffusion coupled with recombination appears to be a major factor. An LTE criterion based on this mechanism has been developed and fits the experimental results quite closely.
Recombination data needed to verify the ambipolar diffusion model have been obtained in a discharge with gas flow, and a virtually constant recombination time of 370 microseconds has been measured in the decaying plasma for conditions ranging from Ne=2×1015 and Te=9000 K to 3×1014 cm−3 and 5500 K.