A modified ZAF method was chosen. For the atomic-number correction, the classical form is maintained by using the mean ionization energy of Zeller. For the absorption correction, the use of the complete expression of the function f( chi ), including the surface ionization phi (O), is required. A few examples of quantitative analysis are given, based on this method. A new semi-empirical table of absorption coefficients, with regard to these elements, is presented. The experimental difficulties which were encountered are examined. This method does not apply to all the elements, only to the low-atomic-number ones. In fact, for each element, a particular value for sigma and h must be chosen.