A review is given of both theoretical and experimental investigations of the sputtering as a result
of strong excitation of the electron subsystem of a solid by fast and multiply charged ions. A
systematic account is given of the main experimentally established relationships governing
inelastic sputtering. An analysis is made of the dependences of the inelastic sputtering coefficient
on the energy and charge of the incident ions and on the target structure, and of the differential
characteristics of the sputtered particles. Theoretical investigations of the electron-excitation
region and its relaxation, of the transfer of the electron energy to the target atoms, and of the
inelastic sputtering models are discussed. A brief account is given of the history of the topic, of
possible practical applications of inelastic sputtering, and of its relationship to other phenomena.