For part I see ibid, vol.9, p.1666 (1994). Total growth rate and composition data of amorphous Si1-(x+y)GexBy thin films grown from silane, germane, diborane and helium-hydrogen gas mixtures at 500 degrees C and 0.2 Torr are the subject of a closer examination. Data are interpreted against the background of the 'three partial rates' model taking into account the results published in part 1. Besides the partial pressures of the source gases, total pressure and temperature, the total atom number per cm3 of the thin film also controls layer growth rate. Additional silicon deposition is principally caused by the presence of germane or diborane in the gas phase. At a deposition temperature of 500 degrees C, however, germane does not cause additional silicon deposition, but diborane does. In the binary Si/Ge and Si/B systems the rate of additional silicon deposition depends on both the partial pressure of the respective source gas and the composition of the thin film. In the ternary Si/Ge/B system, however, the partial growth rate of additionally deposited silicon remains constant as long as, for instance, the diborane partial pressure is unchanged, though the boron content of the film is varied by a variation of the germane partial pressure.