Nanomechanical resonators operating as charge detectors in the nonlinear regime

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2000 EDP Sciences
, , Citation H. Krömmer et al 2000 EPL 50 101 DOI 10.1209/epl/i2000-00241-3

0295-5075/50/1/101

Abstract

We present measurements on nanomechanical resonators machined from silicon-on-insulator substrates. The resonators are designed as freely suspended Au/Si beams of lengths on the order of 1–4 μm and a thickness of 200 nm. The beams are driven into nonlinear response by an applied modulation at radio frequencies and a static magnetic field in plane. The strong hysteresis of the magnetomotive response allows sensitive charge detection by varying the electrostatic potential of a gate electrode.

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10.1209/epl/i2000-00241-3