Amorphous thin-film growth: Theory compared with experiment

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2000 EDP Sciences
, , Citation M. Raible et al 2000 EPL 50 61 DOI 10.1209/epl/i2000-00235-7

0295-5075/50/1/61

Abstract

Experimental results on amorphous ZrAlCu thin-film growth and the dynamics of the surface morphology as predicted from a minimal nonlinear stochastic deposition equation are analysed and compared. Key points of this study are: i) an estimation procedure for coefficients entering into the growth equation and ii) a detailed analysis and interpretation of the time evolution of the correlation length and the surface roughness. The results corroborate the usefulness of the deposition equation as a tool for studying amorphous growth processes.

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