Abstract
A microwave plasma generated by a cylindrical Teflon waveguide has been developed in our laboratory. A cylindrical Teflon rod is to be as a dielectric waveguide for guiding a surface wave to excite the plasma around the rod. This kind of plasma source is expected to have some potential application, e.g. the process of the wall of a cylindrical workpiece. The density and temperature of the plasma, diagnosed by Langmuir probe, were compared with different incident power and pressure. Under the working gas pressure of 40 Pa, the density and temperature near the surface of the Teflon rod are about 1012 cm- 3 and 7 eV, respectively, and they decrease gradually away from the surface in the plasma chamber. The experiment results have been briefly discussed based on electromagnetic theory.