Efficiency of cluster generation in a magnetron discharge

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Published 6 October 2010 Europhysics Letters Association
, , Citation P. V. Kashtanov et al 2010 EPL 91 63001 DOI 10.1209/0295-5075/91/63001

0295-5075/91/6/63001

Abstract

The processes in the magnetron discharge involving metal atoms and metal clusters are analyzed. The efficiency of conversion of metal atoms in clusters is found in stationary magnetron discharge. The scheme of pulse magnetron discharge is considered with a variation of the buffer gas pressure after the electric pulse that provides an increase in the cluster generation efficiency in comparison with the stationary discharge.

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10.1209/0295-5075/91/63001