Abstract
The grain boundary resistivities of polycrystalline Au films are determined without any adjustable parameters by comparing the changes in residual resistivity and average grain size before and after annealing. Surface roughness contribution to the total residual resistivity, which scales with the average grain size differently than the grain boundary contribution, is found to be negligible. The measured resistivity data yield a grain boundary reflection coefficient R that is dependent on the film thickness and varies from 0.28 to 0.4.