Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8

We fabricated highly adherent and electrically conductive micropatterns on SU-8 by supersonic cluster beam deposition (SCBD). This technique is based on the aerodynamical acceleration of neutral metallic nanoparticles produced in the gas phase. The kinetic energy acquired by the nanoparticles allows implantation in an SU-8 layer, thus producing a metal–polymer nanocomposite thin layer. The nanocomposite shows ohmic electrical conduction and it can also be used as an adhesion layer for further metallization with a metallic overlayer. We characterized the electrical conduction, adhesion and biocompatibility of microdevices obtained by SCBD on SU-8 demonstrating the compatibility of our approach with standard lift-off technology on 4'' wafer. A self-standing and flexible microelectrode array has been produced. Cytological tests with neuronal cell lines demonstrated improved cell growth on the nanocomposite layer.