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Yuming Fang1 and Pu Li1
Published 12 September 2013 •
Published under licence by IOP Publishing Ltd
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Citation Yuming Fang and Pu Li 2013 J. Micromech. Microeng. 23 109501
DOI 10.1088/0960-1317/23/10/109501
This is a correction for 2013 J. Micromech. Microeng. 23 045010