Abstract
In this report, two types of normally-off AlGaN/GaN heterostructure field effect transistors (HFETs) with recessed-gate structure have been fabricated by using common technique of induced coupled plasma (ICP) dry etching and a novel technique of selective area growth (SAG), respectively. The devices fabricated by SAG (SAG-HFET) showed better performance than that of ICP-HFETs with larger maximum drain current of 300 mA/mm, positive threshold voltage of 0.4 V, and lower pinch off channel leakage current (2.17×10-3 mA/mm). The analysis indicates that such obvious difference originated from the different AlGaN quality of the gate region under the Schottky contact, in which the damage to the gate region stemmed from dry etching can be avoided by the SAG technique so that the forming of higher quality Schottky contact can be guaranteed. These results indicate that SAG technique is a promising method for fabricating the normally-off GaN based HFETs.