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Characterization of an ArF excimer laser beam from measurements of the Wigner distribution function

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Published 12 April 2011 Published under licence by IOP Publishing Ltd
, , Citation Bernd Schäfer and Klaus Mann 2011 New J. Phys. 13 043013 DOI 10.1088/1367-2630/13/4/043013

1367-2630/13/4/043013

Abstract

An ArF excimer laser beam at a wavelength of 193 nm has been characterized by a quantitative determination of the Wigner distribution function. The setup, comprising a spherical lens, a rotating cylindrical lens and a moveable ultraviolet-sensitive CCD detector, enabled the mapping of the entire four-dimensional phase space within less than 20 min. Experiments yielded complete information about second-order moment-based parameters, spatial coherence, wavefront, beam profiles, as well as beam propagation and local distributions of radiant intensities.

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10.1088/1367-2630/13/4/043013