Abstract
The possibility of separating the topographical and chemical information in a polymer nano-composite using low-voltage SEM imaging is demonstrated, when images are acquired with a Concentric Backscattered (CBS) detector. This separation of chemical and topographical information is based on the different angular distribution of electron scattering which were calculated using a Monte Carlo simulation. The simulation based on angular restricted detection was applied to a semi-branched PNIPAM/PEGDA interpenetration network for which a linear relationship of topography SEM contrast and feature height data was observed.
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