Abstract
The active species of nitrogen plasma was found to add onto the phase separation and atomic ordering of InxGa1-xN nanorods obtained by rf plasma-assisted molecular beam epitaxy. Optical emission spectroscopy identifies the species and their populations at various energy states in association with the obtained decomposed phases discerned by photoluminescence spectroscopy. The rate of change of the concurring phase separation and ordering processes of the alloys is a nonlinear function of the plasma power, which is describable with a microscopic master equation in the context of enhanced chemical reactions and surface diffusion.