Atomic layer etching of chrome using ion beams

Jin Woo Park¹, Doo San Kim¹, Won Oh Lee¹, Ju Eun Kim¹ and Geun Young Yeom^1,2

Published 28 December 2018 • © 2018 IOP Publishing Ltd
Nanotechnology, Volume 30, Number 8 Citation Jin Woo Park et al 2019 Nanotechnology 30 085303 DOI 10.1088/1361-6528/aaf521