Calculated cross sections for electron collisions with NF3, NF2 and NF with applications to remote plasma sources

James R Hamilton; Jonathan Tennyson; Shuo Huang; Mark J Kushner

doi:10.1088/1361-6595/aa6bdf

Plasma Sources Science and Technology

Paper • The following article is Open access

Calculated cross sections for electron collisions with NF₃, NF₂ and NF with applications to remote plasma sources

James R Hamilton¹, Jonathan Tennyson¹, Shuo Huang² and Mark J Kushner²

Published 9 May 2017 • © 2017 IOP Publishing Ltd
Plasma Sources Science and Technology, Volume 26, Number 6 Citation James R Hamilton et al 2017 Plasma Sources Sci. Technol. 26 065010 DOI 10.1088/1361-6595/aa6bdf

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Calculated cross sections for electron collisions with NF3, NF2 and NF with applications to remote plasma sources

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Calculated cross sections for electron collisions with NF₃, NF₂ and NF with applications to remote plasma sources