Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces

Radon Dhelika¹, Kenji Sawai¹, Kunio Takahashi², Wataru Takarada³, Takeshi Kikutani³ and Shigeki Saito¹

Published 5 August 2013 • © 2013 IOP Publishing Ltd
Smart Materials and Structures, Volume 22, Number 9 Citation Radon Dhelika et al 2013 Smart Mater. Struct. 22 095010 DOI 10.1088/0964-1726/22/9/095010