Sputtered porous Pt for wafer-scale manufacture of low-impedance flexible microelectrodes

Bo Fan^1,6, Alexander V Rodriguez^1,6, Daniel G Vercosa², Caleb Kemere^1,3,4 and Jacob T Robinson^1,3,4,5

Published 25 June 2020 • © 2020 The Author(s). Published by IOP Publishing Ltd
Journal of Neural Engineering, Volume 17, Number 3 Citation Bo Fan et al 2020 J. Neural Eng. 17 036029 DOI 10.1088/1741-2552/ab965c