Generating T centres in photonic silicon-on-insulator material by ion implantation
E R MacQuarrie1,2, C Chartrand1, D B Higginbottom1, K J Morse1,2, V A Karasyuk1, S Roorda3 and S Simmons4,1,2
Published 8 October 2021 •
© 2021 The Author(s). Published by IOP Publishing Ltd on behalf of the Institute of Physics and Deutsche Physikalische Gesellschaft
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Citation E R MacQuarrie et al 2021 New J. Phys. 23 103008
DOI 10.1088/1367-2630/ac291f
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