Dynamics of bipolar HiPIMS discharges by plasma potential probe measurements

Michal Zanáška^5,1, Daniel Lundin¹, Nils Brenning², Hao Du^1,3, Pavel Dvořák⁴, Petr Vašina⁴ and Ulf Helmersson^5,1

Published 15 February 2022 • © 2022 The Author(s). Published by IOP Publishing Ltd
Plasma Sources Science and Technology, Volume 31, Number 2 Citation Michal Zanáška et al 2022 Plasma Sources Sci. Technol. 31 025007 DOI 10.1088/1361-6595/ac4b65